操作真空:1 x 10-2 mbar到 1 x 10-4 mbar 溅射电流:0-150mA 沉积速率:0-20nm/分 溅射定时: 0-4 分钟 涡轮分子泵:60 litres/Second (极限真空 1x10-8 mbar) Services - Argon - Nominal 10 psi; Nitrogen- Nominal 10 psi (Argon may be used as common gas) 真空泵:No 2. 泵complete with Vac. Hose & Oil Mist Filter 35L/Min 2m3/Hr 电源:230伏/50Hz(包括泵最大电流为6安培) |